Thermal Vacuum chambers

Special features of SGI- Thermal vacuum chambers

High vacuum chambers:

Horizontal and vertical arrangement
Acc. customer requirements
Degassing rate of polished surface: 6 x 10 -2 mbar I/s

Thermal shrouds and circuits:

For heating/cooling several processes are available
LN2 cooling with system open to atmosphere
GN 2 cooling/heating system using a closed circuit
Inert media cooling/heating system in a closed circuit

Scope of supply

Vacuum chamber
Shroud system
Vacuum pump-set
Thermal system
Instrumentation and control system
Piping and fittings
Process design
Erection and start-up on site